Injection rate : 0 to 4 g/min
Air flow for Sterilization : ≤ 2.4 m3/min
Vaporization Temperature : ≤ 100 °C
Humidity for Dehumidification : ≤ 30 % RH
Vaporization capacity : ≥ 5 ml/min
Air flow for Sterilization : ≥ 80 m3/h
Ambient Temperature : 10 ℃ to 40 ℃
Ambient dust concentration : 100000 particles/ft3
